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MEMS Airflow Sensor
D6F-10A, -20A, -50A
Compact, intelligent sensor featuring
MEMS technology for precision mass
airflow measurement
? Precision mass airflow up to 50 LPM
? Stable output across full scale
? Manifold mounting feature with NBR ‘O’ ring option
? Compact size 78 (L) x 30 (W) x 30 (H) mm
? Low power consumption
? RoHS Compliant
Ordering Information
Description
Mass Flow Sensor
Case
Thermoplastic resin
/ Aluminum alloy
Applicable Gas
Air*
Flow Range**
0 – 10 LPM
0 – 20 LPM
Connection Type
Right-angle manifold
mount connection
Model
D6F-10A5-000
D6F-20A5-000
0 – 50 LPM
0 – 10 LPM
D6F-50A5-000
Straight RC1/4 (1/4” BSPT) D6F-10A6-000
0 – 20 LPM
0 – 50 LPM
threaded pipe*
D6F-20A6-000
D6F-50A6-000
Cable Connector Assembly
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D6F-CABLE1
Note: Cable Assembly is sold separately.
* Contact Omron for other gases or thread types.
**Mass flow converted to volumetric flow (standard liters per minute) at 0 ° C and 1 atm.
■ Application Examples
?
?
?
?
Industrial processes
Medical Respirators and Ventilators
MiG and TiG welding systems
Anesthesia Delivery
? Mass flow controllers
? Scientific / test equipment
? Fuel cell controls
Rating
■ Absolute maximum rating
Item
Power supply
Output voltage
Symbol
V CC
V OUT
Ratings
26.4
6
Unit
VDC
VDC
■ Electrical Performance
Item
Power supply
Operating temperature
Output voltage (max.)
Output voltage (min.)
Term
V CC
T OPR
V OH
V OL
Condition
—
No condensation or icing
V CC = 12 to 24VDC I OH = 0.5mA
V CC = 12 to 24VDC I OL = -0.5mA
MIN
10.8
-10
5
0
MAX
26.4
60
5.7
1
Unit
VDC
° C
VDC
VDC
MEMS Airflow Sensor
D6F-10A, -20A, -50A
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